Specific Process Knowledge/Etch: Difference between revisions
mNo edit summary |
|||
| Line 35: | Line 35: | ||
*[[/Aluminum Oxide|Aluminum Oxide]] | *[[/Aluminum Oxide|Aluminum Oxide]] | ||
*[[/Etching of Bulk Glass|Bulk Glass]] - ''Borofloat (pyrex) and fused silica (quartz)'' | *[[/Etching of Bulk Glass|Bulk Glass]] - ''Borofloat (pyrex) and fused silica (quartz)'' | ||
*Litiumniobate | |||
|style="background: #DCDCDC"| | |style="background: #DCDCDC"| | ||
*[[/Etching of Silicon|Silicon]] | *[[/Etching of Silicon|Silicon]] | ||