LabAdviser/Courses/TPT Dry Etch: Difference between revisions
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The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here]. | The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here]. | ||
'''Course | '''Course Layout''' | ||
# Online lecture videos (theory) | # Online lecture videos (theory) | ||
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''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ||
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* Tuning of the dry etch process | * Tuning of the dry etch process | ||
* Overview of the dry etch equipment at Nanolab | * Overview of the dry etch equipment at Nanolab | ||
After the course you will be able to | After the course you will be able to | ||
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* Spot when the recipe needs to be tuned for his/her needs and | * Spot when the recipe needs to be tuned for his/her needs and | ||
* Suggest relevant tuning parameters | * Suggest relevant tuning parameters | ||
'''Qualifying Prerequisites''' | '''Qualifying Prerequisites''' | ||
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* Cleanroom safety course at DTU Nanolab | * Cleanroom safety course at DTU Nanolab | ||
* Admission to the cleanroom must be obtained before the group training session | * Admission to the cleanroom must be obtained before the group training session | ||
'''Course Responsible''' | '''Course Responsible''' | ||
*Jonas Michael-Lindhard | *Jonas Michael-Lindhard | ||
*Berit Herstrøm | *Berit Herstrøm | ||
If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk]. | If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk]. | ||
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