Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

@@ Line 245: / Line 245: @@
 The nanoetch
+{| {{table}}
+| align="center" style="background:#f0f0f0;"|''''''
+| align="center" style="background:#f0f0f0;"|'''ER'''
+| align="center" style="background:#f0f0f0;"|'''SA'''
+| align="center" style="background:#f0f0f0;"|'''base'''
+| align="center" style="background:#f0f0f0;"|'''foot'''
+| align="center" style="background:#f0f0f0;"|'''Bowing'''
+| align="center" style="background:#f0f0f0;"|'''Curve'''
+|-
+| ||nm/min||degs||nm/edge||nm/edge||||
+|-
+| 30||236||84,37759937||28||28||21||-30
+|-
+| 60||307||82,39788067||46||46||32||-27
+|-
+| 90||333||82,87498365||62||62||35||-18
+|-
+| 120||341||81,25383774||88||88||33||14
+|-
+| 150||339||80,29807321||103||103||36||16
+|-
+| Avg||311||82||65||65||31||-9
+|-
+| Std||44||2||30||30||6||22
+|-
+| zep||0||||||||||
+|-
+|
+|}