Specific Process Knowledge/Lithography/Strip: Difference between revisions
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The ashing rate is related to the gas mix, usually expressed as percentage of nitrogen of the total amount of gas. Process development tests found that a gas mix of 50% nitrogen gives the highest ashing rate for both processing single substrates and when processing a full boat with 25 substrates. | The ashing rate is related to the gas mix, usually expressed as percentage of nitrogen of the total amount of gas. Process development tests found that a gas mix of 50% nitrogen gives the highest ashing rate for both processing single substrates and when processing a full boat with 25 substrates. | ||
Please note that the ashing rate for a full boat is approximately ten times slower, than | Please note that the ashing rate for a full boat is approximately ten times slower, than the processing time for a single substrate. | ||
'''Single substrate:'''<br> | '''Single substrate:'''<br> | ||