Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 181: | Line 181: | ||
|- | |- | ||
! One point on wafer | ! One point on wafer | ||
| | |||
| | | | ||
| | | | ||
| Line 196: | Line 197: | ||
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14|Images]] | |[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14|Images]] | ||
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano141|Images]] | |[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano141|Images]] | ||
|- | |- | ||
|} | |} | ||