Specific Process Knowledge/Lithography/Strip: Difference between revisions
| Line 437: | Line 437: | ||
*Resist: 1.5 µm AZ 5214E | *Resist: 1.5 µm AZ 5214E | ||
*Substrate: 100 mm Si | *Substrate: 100 mm Si | ||
*O<sub>2</sub>: | *O<sub>2</sub>: 100 sccm | ||
*N<sub>2</sub>: | *N<sub>2</sub>: 100 sccm | ||
*Pressure (DSC): 1.3 mbar | *Pressure (DSC): 1.3 mbar | ||
*Power: 1000 W | *Power: 1000 W | ||