Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 73: | Line 73: | ||
|- | |- | ||
! Process time (s) | ! Process time (s) | ||
|120 | |||
|120 | |||
|120 | |120 | ||
|120 | |120 | ||
No edit summary |
No edit summary |
||
| Line 73: | Line 73: | ||
|- | |- | ||
! Process time (s) | ! Process time (s) | ||
|120 | |||
|120 | |||
|120 | |120 | ||
|120 | |120 | ||