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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography click here]'''


[[Category: Equipment|Lithography]]
[[index.php?title=Category:Equipment|Lithography]]
[[Category: Lithography]]
[[index.php?title=Category:Lithography]]


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=Lithography Tool Package Training=
=Lithography Tool Package Training=


DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.
DTU Nanolab offers a Tool Package Training in Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for specific equipment. The theory part consists of lecture videos followed by quizzes for each section. Once that part has been completed successfully, you can begin the online training for the lithography equipment you need to use. After completing the online training, you can request hands-on training for the lithography equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].  


You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.


For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]].


'''Course Description'''


'''Signing up for the course'''
# Online lecture videos
# Quizzes for each section
# Equipment-related training videos
# Hands-on training


The course is in DTU Learn. You sign up for the course by enrolling yourself in the course [https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56077 DTU Nanolab TPT: Lithography] - '''requires login'''
''Hands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
* Watch the lecture videos
* Successfully complete all the quizzes




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'''After completing the TPT'''
When all TPT quizzes have been completed successfully, you have finished the lithography TPT, and can begin the online training on the lithography equipment you need to use. The online training is available in the course [https://learn.inside.dtu.dk/d2l/le/discovery/view/course/118192 DTU Nanolab: lithography equipment training] - '''requires login'''
After completing the online equipment training, you become eligible for the hands-on authorization training, which will take place inside the cleanroom.
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=Knowledge and Information about Lithography=
=Knowledge and Information about Lithography=
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*[[Specific_Process_Knowledge/Lithography/Resist#UV_resist_comparison_table|UV resist process flows]]
*[[Specific_Process_Knowledge/Lithography/Resist#UV_resist_comparison_table|UV resist process flows]]
*[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_flow|E-beam resist process flows]]
*[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_flow|E-beam resist process flows]]
*[[:Media:Process_Flow_TPT first print.pdf|Old TPT process flow (first print)]]
*[[index.php?title=Media:Process Flow TPT first print.pdf|Old TPT process flow (first print)]]
*[[:Media:Process_Flow_TPT alignment.pdf|Old TPT process flow (alignment)]]
*[[index.php?title=Media:Process Flow TPT alignment.pdf|Old TPT process flow (alignment)]]
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