Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch): Difference between revisions
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The AOE can be used for etching silicon oxide, silicon (oxy)nitride and quartz. Look in the manuals for the AOE to see how to operate the machine (you can find the manuals in LabManager on the [http://labmanager.danchip.dtu.dk/machine/machine_item.php?refpage=machlist&id=115 AOE page]). | The AOE can be used for etching silicon oxide, silicon (oxy)nitride and quartz. Look in the manuals for the AOE to see how to operate the machine (you can find the manuals in LabManager on the [http://labmanager.danchip.dtu.dk/machine/machine_item.php?refpage=machlist&id=115 AOE page]). | ||
Currently all training on the AOE should agreed with Berit Geilman Herstrøm. for training requests e-mail to [mailto:training@danchip.dtu.dk training@danchip.dtu.dk] | Currently all training on the AOE should agreed with Berit Geilman Herstrøm. for training requests e-mail to [mailto:training@danchip.dtu.dk?Subject=AOE%20training training@danchip.dtu.dk] | ||
== Process information == | == Process information == | ||