Specific Process Knowledge/Lithography/Strip: Difference between revisions
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<b>Test parameters:</b><br> | <b>Test parameters:</b><br> | ||
Total gas flow rate: 500 sccm<br> | Total gas flow rate: 500 sccm<br> | ||
Gas mix ratio: set to test ratios<br> | |||
DSC: not used for this test<br> | |||
Chamber pressure: 1.2 mbar<br> | Chamber pressure: 1.2 mbar<br> | ||
Power: 1000 W<br> | Power: 1000 W<br> | ||