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Specific Process Knowledge/Lithography/Descum: Difference between revisions

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''Jitka Urbánková & Jesper Hanberg, December 2019''
''Jitka Urbánková & Jesper Hanberg, December 2019''
[[image:descum_graf.jpg|640px|thumb|Descum results plasma asher 2 - recipe 1]]
[[image:descum_graf.jpg|640px|thumb|Descum results plasma asher 2 - recipe 1]]
<span style="color:red">This tool has been decomissioned 2024-12-02.</span>


The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=200 LabManager] - '''requires login'''
The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=200 LabManager] - '''requires login'''