Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask: Difference between revisions
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File:C010184tilt20plasmaO2_07.jpg| tilt 20 degrees | File:C010184tilt20plasmaO2_07.jpg| tilt 20 degrees | ||
File:C010184tilt20plasmaO2_05.jpg| tilt 20 degrees | File:C010184tilt20plasmaO2_05.jpg| tilt 20 degrees | ||
</gallery> | </gallery>[[File:C1018405.jpg|thumb|After RCA clean]] | ||
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