Specific Process Knowledge/Wafer and sample drying: Difference between revisions

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 !Batch size
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-*1-25 100 mm wafers
+*100 mm wafers: 1-25
-*1-25 150 mm wafers
+*150 mm wafers: 1-25
 |
-*1-25 100 mm wafers
+*100 mm wafers: 1-25
-*1-25 150 mm wafers
+*150 mm wafers: 1-25
 |
-*1-25 100 mm wafers
+*100 mm wafers: 1-25
-*1-25 150 mm wafers
+*150 mm wafers: 1-25
 |
-*1-25 100 mm wafers
+*100 mm wafers: 1-25
-*1-25 150 mm wafers
+*150 mm wafers: 1-25
-*1-25 200 mm wafers
+*200 mm wafers: 1-25
 |
 *1 to 5 wafers per run. Sizes: 2”, 4" or 6"
 * Pieces (up to 10x10mm)
 |
-*1-25 50 mm wafers
+*50 mm wafers: 1-25
-*1-25 100 mm wafers
+*100 mm wafers: 1-25
 *Pieces if a suitable carrier is available
 |