Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|800px]] || [[image:BM4P-509 small.png|300px]] | | Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|800px]] || [[image:BM4P-509 small.png|300px]] || | ||
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| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]] || [[image:BM6P-502 small.png|300px]] | | 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]] || [[image:BM6P-502 small.png|300px]] || | ||
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| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|800px]] || [[image:BM6P-502 small.png|300px]] | | 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|800px]] || [[image:BM6P-502 small.png|300px]] || | ||
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| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] || [[image:BM4P-509 small copy.png|300px]] | | 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] || [[image:BM4P-509 small copy.png|300px]] || | ||
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| 3" || BM4P-025 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-025_cas.png|800px]] || [[image:BM4P-509 small copy.png|300px]] | | 3" || BM4P-025 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-025_cas.png|800px]] || [[image:BM4P-509 small copy.png|300px]] || | ||
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| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|800px]] || [[image:BSPCL-520 small.png|300px]] | | 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|800px]] || [[image:BSPCL-520 small.png|300px]] || | ||
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