Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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|[[ | |[[index.php?title=Media:Process Flow CSAR.docx|CSAR]] <br> [[index.php?title=Media:Process Flow CSAR with Al.docx|CSAR with Al]] <br> [[index.php?title=Media:Process Flow LOR5A CSAR Developer TMAH Manual.docx|LOR5A with CSAR]] <br> | ||
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=Job file compilation= | =Job file compilation= | ||
Once the files are transferred to the EBL control computer they can be compiled into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. In a terminal window on desktop two the SDF, JDF and V30 files can be compiled into a MGN file with the SCHD command. Compile the files with the following procedure | Once the files are transferred to the EBL control computer they can be compiled into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. In a terminal window on desktop two the SDF, JDF and V30 files can be compiled into a MGN file with the SCHD command. Compile the files with the following procedure: | ||
*Select a terminal window | *Select a terminal window | ||
*Make sure to be in the correct folder by writing "cd job/ | *Make sure to be in the correct folder by writing "cd job/1nlab" | ||
*Compile by writing "schd -exptime sdffilename", replacing sdffilename with the actual filename | *Compile by writing "schd -exptime sdffilename", replacing sdffilename with the actual filename | ||
*Verify that the compiler presents a sequence list with a time estimate, this indicates successful compilation | *Verify that the compiler presents a sequence list with a time estimate, this indicates successful compilation | ||
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If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a .MGN file will be generated in | |||
If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a .MGN file will be generated in 1nlab folder. This file contains all relevant exposure information and it is this file one will load to the Expose module to initiate exposure. | |||
If compilation does not succeed the terminal will respond with a number of errors indicating which line(s) of the SDF or JDF file is causing the error. The system is extremely sensitive to syntax error and all users will experience compilation errors. The errors can be difficult to decipher, please refer to the '''Compilation Error Guide. UPDATE''' | If compilation does not succeed the terminal will respond with a number of errors indicating which line(s) of the SDF or JDF file is causing the error. The system is extremely sensitive to syntax error and all users will experience compilation errors. The errors can be difficult to decipher, please refer to the '''Compilation Error Guide. UPDATE''' | ||
=Job file verification= | =Job file verification= | ||
To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. It is rarely feasible or | To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. It is rarely feasible or necessary to manually validate all parts of a design but one should at least inspect a few parts of the pattern to verify it looks correct and also verify that pattern placement is as expected. This can be done using the Array Check Program '''(ACHK)''' found on the '''Analysis''' pane. The '''Analysis''' pane is usually open on the right hand side of the second desktop, if not, it can be opened from the '''EBX Menu.''' Pattern check can be done by the following procedure | ||
*Open '''ACHK''' from the '''Analysis''' pane | *Open '''ACHK''' from the '''Analysis''' pane | ||