Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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As the smaller slots are quite narrow and suffer from a significant y-axis offset, it can be necessary to apply an offset for correct placement. The offset indicated below is the observed offset, hence to counter it one must apply a y-axis offset in the opposite direction. | As the smaller slots are quite narrow and suffer from a significant y-axis offset, it can be necessary to apply an offset for correct placement. The offset indicated below is the observed offset, hence to counter it one must apply a y-axis offset in the opposite direction. | ||
==Wafer exposable area== | |||
As the wafer is clamped to the cassette a small portion along the circumference is covered by the cassette and hence this part is not exposable. The exposable diameter for round wafers are: | |||
*2": 44 mm | |||
*4": 93 mm | |||
*6": 138 mm | |||
== Cassette overview == | == Cassette overview == | ||