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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

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|-
|-
| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|800px]] || 3A: (80.000, 60.000)
| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|800px]] || [[image:BM4P-509 small.png|300px]]
3B: (200.000, 60.000)
 
3C: (80.000, 180.000)
 
3D: (200.000, 180.000)


|-
|-
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]] || 2A: (80.000. 40.000)
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]] || [[image:BM6P-502 small.png|300px]]
2B: (200.000. 40.000)
 
2C: (80.000. 120.000)
 
2D: (200.000. 120.000)
 
2E: (80.000. 200.000)
 
2F: (200.000. 200.000)
|-
|-
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|800px]] || 2A: (80.000. 40.000)
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|800px]] || [[image:BM6P-502 small.png|300px]]
2B: (200.000. 40.000)
 
2C: (80.000. 120.000)
 
2D: (200.000. 120.000)
 
2E: (80.000. 200.000)
 
2F: (200.000. 200.000)
|-
|-
| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] || 3A: (80.000, 60.000)  
| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] || 3A: (80.000, 60.000)  
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