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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
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! Substrate size !! ID !! Slot ID !! Material !! Image !! Position indication !! Approximate offset [µm]
! Substrate size !! ID !! Slot ID !! Material !! Image !! Position indication !! Approximate offset [µm]
|-
|-
| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|700px]] || [[image:BM4P-509 small.png|300px]]
| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|800px]] || [[image:BM4P-509 small.png|300px]]


|| Measured 2024-01-05
|| Measured 2024-01-05