Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
Appearance
| Line 27: | Line 27: | ||
== Stage position and cassette orientation== | == Stage position and cassette orientation== | ||
The stage control window indicates where the stage is currently placed. It indicates this position with a coordinate and a small, red indicator inside the blue box, as illustrated below. | The stage control window indicates where the stage is currently placed. It indicates this position with a coordinate and a small, red indicator inside the blue box, as illustrated below. The system does however not really indicate how the cassette or cassette slots are placed, thus we have provided an approximate illustration of this below. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||
| Line 34: | Line 34: | ||
|- | |- | ||
| colspan="2" style="text-align:enter;| | | colspan="2" style="text-align:enter;| | ||
The stage position is indicated by the red dot inside the blue square. | Left: The stage position is indicated by the red dot inside the blue square. Right: Example of cassette and slot placement relative to the blue square in the Stage Control Window. | ||
|} | |} | ||