Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace: Difference between revisions
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==The Resist Pyrolysis furnace== | ==The Resist Pyrolysis furnace== | ||
[[Image:ATV_ovn.jpg|thumb|365x365px| | [[Image:ATV_ovn.jpg|thumb|365x365px|Resist Pyrolysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | ||
[[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the | [[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the Resist Pyrolysis furnace (from an oxidation test). Photo: DTU Nanolab internal]] | ||
From February 2024: The name of the furnace has changed from Multipurpose Anneal | From February 2024: The name of the furnace has changed from "Multipurpose Anneal furnace" to "Resist Pyrolysis furnace" (or “Furnace: Resist Pyrolysis” in LabManager). At the same time, the furnace has become a research tool. This means, that the furnace is mainly available for users working on certain research projects at DTU Nanolab, and it should mainly be used for resist pyrolysis | ||
The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015. | The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015. | ||
The furnace is mainly being used for resist pyrolysis | The furnace is mainly being used for resist pyrolysis. It can also be used for annealing in nitrogen (N<sub>2</sub>) and oxidation with oxygen (O<sub>2</sub>), but O<sub>2</sub> is mostly used for cleaning of the furnace after resist pyrolysis. | ||
Process steps can run either in vacuum or at atmospheric pressure. A small | Process steps can run either in vacuum or at atmospheric pressure. A small N<sub>2</sub> or O<sub>2</sub> flow (up to 2 slm) can be applied in vacuum steps. | ||
The quartz parts in the furnace can be changed, depending on what processes and samples the furnace is used for, but it been decided that a quartz set for resist resist pyrolysis will be mounted in the furnace all the time. This limits the number of materials that are allowed in the furnace | The quartz parts in the furnace can be changed, depending on what processes and samples the furnace is used for, but it has been decided that a quartz set for resist resist pyrolysis will be mounted in the furnace all the time. This limits the number of materials that are allowed in the furnace. | ||
All process | All process gases (except purge nitrogen) are heated, before they are introduced into the furnace at the door side. | ||
The furnace tube is heated by use of 12 long heaters situated along the furnace tube and combined in three groups (top, bottom left and bottom right) and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. | The furnace tube is heated by use of 12 long heaters situated along the furnace tube and combined in three groups (top, bottom left and bottom right) and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. The maximum allowed processing time and temperature is 3 hours at 1050 <sup>o</sup>C. | ||
The furnace body surrounding the furnace tube consists of a top and bottom half-shell. To cool down the furnace (when the temperature is below 800 <sup>o</sup>C), the top half shelf can be lifted up, and cooling fans will then flow air from the surroundings around the furnace tube to cool it down. However, for safety reasons, the cooling fans will not the activated when there is hydrogen in the furnace, and cooling will then be very slow. | The furnace body surrounding the furnace tube consists of a top and bottom half-shell. To cool down the furnace (when the temperature is below 800 <sup>o</sup>C), the top half shelf can be lifted up, and cooling fans will then flow air from the surroundings around the furnace tube to cool it down. However, for safety reasons, the cooling fans will not the activated when there is hydrogen in the furnace, and cooling will then be very slow. | ||