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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
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===Profile SEM images===
===Profile SEM images===
{| border="2" cellspacing="2" cellpadding="3" style="width: 100%;"
{| border="2" cellspacing="2" cellpadding="3" style="width: 100%;"  
!style="width: 20%"|Recipe settings
!style="width: 20%"|Recipe settings
!style="width: 10%"|Comments
!style="width: 10%"|Comments
!style="width: 70%"|SEM gallery
!style="width: 70%"|SEM gallery
|-
|- style="vertical-align:top;"
|
|
*'''On 6" wafer'''
*'''On 6" wafer'''
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File:C09721_center_22.jpg
File:C09721_center_22.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*'''Piece on Si carrier'''
*'''Piece on Si carrier'''
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File:C10022_03__12.jpg
File:C10022_03__12.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*Coil Power [W]:2500
*Coil Power [W]:2500
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File:C10025_03__01.jpg
File:C10025_03__01.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*Coil Power [W]:2500
*Coil Power [W]:2500
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File:C10026_03__10.jpg
File:C10026_03__10.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*Coil Power [W]:2500
*Coil Power [W]:2500
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File:C010082tilt30_13.jpg
File:C010082tilt30_13.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*'''Coil Power [W]:1200'''
*'''Coil Power [W]:1200'''
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File:C10084_03.jpg
File:C10084_03.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*Coil Power [W]:1200
*Coil Power [W]:1200
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File:C10093_03__01.jpg
File:C10093_03__01.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*Coil Power [W]:1200
*Coil Power [W]:1200
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File:C10101_03__14.jpg
File:C10101_03__14.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*'''Coil Power [W]:1800'''
*'''Coil Power [W]:1800'''
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File:C10102_03__16.jpg
File:C10102_03__16.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*Coil Power [W]:1800
*Coil Power [W]:1800
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File:C10110_12.jpg
File:C10110_12.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*'''Coil Power [W]:1200'''
*'''Coil Power [W]:1200'''
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File:C10119_11.jpg
File:C10119_11.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*Coil Power [W]:1200
*Coil Power [W]:1200
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File:Contour Plot Y32 EM_02_30 blue to red.jpg| Etch on none patterned wafer, Uniformity: +- 6.4%
File:Contour Plot Y32 EM_02_30 blue to red.jpg| Etch on none patterned wafer, Uniformity: +- 6.4%
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*'''Coil Power [W]:1800'''
*'''Coil Power [W]:1800'''
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File:C010161tilt_04.jpg
File:C010161tilt_04.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*'''Coil Power [W]:1200'''
*'''Coil Power [W]:1200'''
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File:C010184tilt20plasmaO2_05.jpg| tilt 20 degrees
File:C010184tilt20plasmaO2_05.jpg| tilt 20 degrees
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*'''Coil Power [W]:2500'''
*'''Coil Power [W]:2500'''
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File:C10381_30dg_21.jpg
File:C10381_30dg_21.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*Coil Power [W]:2500
*Coil Power [W]:2500
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File:C10393_16.jpg
File:C10393_16.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*'''14 min'''
*'''14 min'''
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File:C10399_13.jpg
File:C10399_13.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*'''Back to start setting without EM coils - 14 min'''
*'''Back to start setting without EM coils - 14 min'''
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File:C10576_17.jpg
File:C10576_17.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*'''Coil Power [W]:600'''
*'''Coil Power [W]:600'''
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File:C10751_12.jpg
File:C10751_12.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
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*'''Coil Power [W]:300'''
*'''Coil Power [W]:300'''
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File:C10752_10.jpg
File:C10752_10.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
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*'''45 min'''
*'''45 min'''
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File:C10834T_22.jpg
File:C10834T_22.jpg
</gallery>
</gallery>
|-
|- style="vertical-align:top;"
|
|
*Coil Power [W]:300
*Coil Power [W]:300
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