Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask: Difference between revisions
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===Profile SEM images=== | ===Profile SEM images=== | ||
{| border="2" cellspacing="2" cellpadding="3" style="width: 100%;" | {| border="2" cellspacing="2" cellpadding="3" style="width: 100%;" | ||
!Recipe settings | !style="width: 20%"|Recipe settings | ||
!Comments | !style="width: 10%"|Comments | ||
!SEM gallery | !style="width: 70%"|SEM gallery | ||
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