Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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==DRIE-Pegasus== | ==DRIE-Pegasus== | ||
The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further. | The DRIE-Pegasus takes the well established Bosch process known from the [[Specific_Process_Knowledge/Etch/ASE_(Advanced_Silicon_Etch)|ASE]] a significant step further. | ||
===[[Advanced_Silicon_Etcher_-_Pegasus|Details on DRIE-Pegasus]]=== | ===[[Advanced_Silicon_Etcher_-_Pegasus|Details on DRIE-Pegasus]]=== | ||