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| </gallery> | | </gallery> |
| |} | | |} |
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| ===Profile, top view at tilted SEM images on 800 nm pitch and 50% duty cycle ( look at the Cr mask in top of the page===
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| <gallery caption="SiO2 etch with Cr mask on full wafer 6 min etch" perrow="2" widths="400px" heights="300px">
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| File:C09721_center_21.jpg
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| </gallery>
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch" perrow="2" widths="400px" heights="300px">
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| File:C10022_03__02.jpg
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| </gallery>
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm" perrow="2" widths="400px" heights="300px">
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| File:C10025_03__07.jpg
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| </gallery>
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, O2:5sccm" perrow="2" widths="400px" heights="300px">
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| File:C10026_03__01.jpg
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| </gallery>
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:225sccm, Pressure:3.35mTorr" perrow="4" widths="400px" heights="300px">
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|
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| File:C10082_07.jpg
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| File:C010082top_07.jpg
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| File:C010082top_03.jpg
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| File:C010082tilt30_13.jpg
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:225sccm, Pressure:3.35mTorr; platen power 150W, coil power:1200W" perrow="2" widths="400px" heights="300px">
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| File:C10084_11.jpg
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| </gallery>
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:215sccm O2:10sccm, Pressure:3.6mTorr; platen power 150W, coil power:1200W" perrow="2" widths="400px" heights="300px">
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| File:C10093_03__07.jpg
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|
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 150W, coil power:1200W" perrow="2" widths="400px" heights="300px">
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| File:C10101_03__07.jpg
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|
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:215sccm O2:10sccm, Pressure:3.6mTorr; platen power 150W, coil power:1800W" perrow="2" widths="400px" heights="300px">
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| File:C10102_03__01.jpg
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|
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 150W, coil power:1800W" perrow="2" widths="400px" heights="300px">
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|
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| File:C10110_08.jpg |pitch 800 nm <br> Top 461 nm <br> @edge 437 nm <br> bottom 402 nm <br> height 916 nm <br> height from edge 827 nm <br> Cr left 83.5 nm <br> selectivity 55.5
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|
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 6 min etch, H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 100W, coil power:1200W" perrow="2" widths="400px" heights="300px">
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|
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| File:C10119_05.jpg |pitch 800 nm <br> Top 444 nm <br> bottom 374 nm <br> height 718 nm <br> Cr left 85 nm <br> selectivity 48
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|
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 14 min etch (PLEASE DO NOT REPEAT THIS LONG TIME), H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 100W, coil power:1200W" perrow="2" widths="400px" heights="300px">
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| File:C10160_09.jpg
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|
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 10 min etch, H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.6mTorr; platen power 150W, coil power:1800W" perrow="4" widths="400px" heights="300px">
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| File:C10161_05.jpg
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| File:C010161top_01.jpg
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| File:C010161tilt_04.jpg
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| </gallery>
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|
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| <gallery caption="SiO2 etch with Cr mask on wafer piece on Si carrier 14 min etch, EM:0/0 H2:0sccm, C4F8:13sccm He:205sccm O2:20sccm, Pressure:3.9mTorr; platen power 100W, coil power:1200W, the mask is removed by plasma ashing on top view and tilted view" perrow="4" widths="400px" heights="300px">
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| File:C10184_07.jpg
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| File:C010184top_01.jpg
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| File:C010184top_04.jpg
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| File:C010184tilt30plasmaO2_02.jpg| tilt 30 degrees
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| File:C010184tilt30plasmaO2_01.jpg| tilt 30 degrees
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| File:C010184tilt20plasmaO2_07.jpg| tilt 20 degrees
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| File:C010184tilt20plasmaO2_05.jpg| tilt 20 degrees
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| </gallery>
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