Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 29: | Line 29: | ||
|15 | |15 | ||
|0 | |0 | ||
| | |0 | ||
|- | |- | ||
!BCl<sub>3</sub> (sccm) | !BCl<sub>3</sub> (sccm) | ||
| Line 41: | Line 41: | ||
|5 | |5 | ||
|5 | |5 | ||
| | |5 | ||
|- | |- | ||
!HBr (sccm) | !HBr (sccm) | ||
| Line 53: | Line 53: | ||
|0 | |0 | ||
|15 | |15 | ||
| | |15 | ||
|- | |- | ||
! Coil power (W) | ! Coil power (W) | ||
| Line 65: | Line 65: | ||
|900 (Forward) | |900 (Forward) | ||
|900 (Forward) | |900 (Forward) | ||
| | |900 (Load) | ||
|- | |- | ||
!Platen power (W) | !Platen power (W) | ||
| Line 77: | Line 77: | ||
|60 | |60 | ||
|75 | |75 | ||
| | |60 | ||
|- | |- | ||
! Pressure (mtorr) | ! Pressure (mtorr) | ||
| Line 89: | Line 89: | ||
|10 | |10 | ||
|2 | |2 | ||
| | |10 | ||
|- | |- | ||
!Temperature (<sup>o</sup>C) | !Temperature (<sup>o</sup>C) | ||
| Line 113: | Line 113: | ||
|180 | |180 | ||
|300 | |300 | ||
| | |180 | ||
|- | |- | ||
! Nominal line width | ! Nominal line width | ||