Jump to content

Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

Jml (talk | contribs)
Jml (talk | contribs)
Line 91: Line 91:
|
|
|-
|-
!Temperature (<sup>o</sup>C)
|
|
|
|
|
|
|
|
|
|
|-
|-
! Process time (s)
! Process time (s)