Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/SiO2 etch: Difference between revisions
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<gallery> | <gallery caption="Etch rate uniformity" perrow="3"> | ||
File:Peg3 SiO2 uniformity Y34 to Y40.jpg | File:Peg3 SiO2 uniformity Y34 to Y40.jpg | ||
File:Peg3 SiO2 uniformity normalized Y34 to Y40.jpg | File:Peg3 SiO2 uniformity normalized Y34 to Y40.jpg | ||
File:Peg3 Si etch uniformity Y38 and Y40.jpg | File:Peg3 Si etch uniformity Y38 and Y40.jpg | ||
</gallery> | </gallery> | ||