Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/SiO2 etch: Difference between revisions

@@ Line 7: / Line 7: @@
 {{CC-bghe2}} <br>
 [[File:Peg3 SIO2 uniformity - Contour Plot 5.jpg|400px]]
+{| class="wikitable"
+|+ Tests with SiO2 etch
+|-
+! C4F8 !! SF6 flow !! Ar !! Coil power !! Platen power !! Presure !! Header text
+|-
+| Example || Example || Example || Example || Example || Example || Example
+|-
+| Example || Example || Example || Example || Example || Example || Example
+|-
+| Example || Example || Example || Example || Example || Example || Example
+|-
+| Example || Example || Example || Example || Example || Example || Example
+|-
+| Example || Example || Example || Example || Example || Example || Example
+|-
+| Example || Example || Example || Example || Example || Example || Example
+|-
+| Example || Example || Example || Example || Example || Example || Example
+|}