LabAdviser/Courses/TPT Thin Film: Difference between revisions
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The next lecture will be held on the 15th of February 2024 from 9.30-11.30. The lecture will be held in room 121A in building 345C. | |||
Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. | |||
In DTU Learn, you have to enroll yourself in the Thin Film TPT course and then sign up for the lecture under "Groups" afterwards. | |||
You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. | |||
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | ||
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If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk.--> | |||
<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.--> | <!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.--> | ||
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<i>Sign up for the next lecture here: https:// | <i>The next lecture will be held on the 20th of February 2024 from 9-12. The lecture will be held in room 121C in building 345C. | ||
Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. | |||
In DTU Learn, you have to enroll yourself in the Thin Film TPT course and then sign up for the lecture under "Groups" afterwards. | |||
You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. | |||
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. | Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. | ||
Revision as of 09:26, 8 February 2024
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Thin Film TPT
DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.
Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
| Thin film tool package training (TPT) | |
|---|---|
| Schedule |
Theoretical part
1st lecture (2 - 2½ hours):
The next lecture will be held on the 15th of February 2024 from 9.30-11.30. The lecture will be held in room 121A in building 345C. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you have to enroll yourself in the Thin Film TPT course and then sign up for the lecture under "Groups" afterwards. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
2nd lecture (3 - 3½ hours):
The next lecture will be held on the 20th of February 2024 from 9-12. The lecture will be held in room 121C in building 345C. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you have to enroll yourself in the Thin Film TPT course and then sign up for the lecture under "Groups" afterwards. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
Practical part
|
| Location |
Theoretical part The locations for the lectures will be notified in the Doodles |
| Qualified prerequisites |
None |
| Preparations |
No preparation is required. However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login). Links to more literature about thin films can be found below. |
| Course responsible |
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk) |
| Learning goals |
|
Presentations from the lectures
Slides from the 1st lecture
Slides from the 2nd lecture
Literature
Some literature about thin films can be found here (requires a login):
Introduction to thin films
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
- D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
- K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films