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Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions

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==Titanium deposition ==
==Titanium deposition ==


Titanium can be deposited by e-beam evaporation or sputtering.  
Titanium can be deposited at DTU Nanolab by e-beam evaporation or sputtering.  


*[[/Ti deposition in Sputter System (Lesker)|Ti deposition in Sputter System (Lesker)]]
*[[/Ti deposition in Sputter System (Lesker)|Ti deposition in Sputter System (Lesker)]]
In the chart below you can compare the different deposition equipment.


== Ti as an adhesion layer ==
== Ti as an adhesion layer ==