Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions
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==Titanium deposition == | ==Titanium deposition == | ||
Titanium can be deposited by e-beam evaporation or sputtering. | Titanium can be deposited at DTU Nanolab by e-beam evaporation or sputtering. | ||
*[[/Ti deposition in Sputter System (Lesker)|Ti deposition in Sputter System (Lesker)]] | *[[/Ti deposition in Sputter System (Lesker)|Ti deposition in Sputter System (Lesker)]] | ||
== Ti as an adhesion layer == | == Ti as an adhesion layer == | ||