Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
| Line 345: | Line 345: | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Ar | *Ar | ||
*N< | *N<sub>2</sub> | ||
*O< | *O<sub>2</sub> | ||
*2%O< | *2 % O<sub>2</sub> in Ar | ||
* mixtures of the above | * mixtures of the above | ||
|- | |- | ||