Specific Process Knowledge/Thin film deposition/Deposition of Alumina: Difference between revisions
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*Very good. Covers sample everywhere (but long purge time needed for very high aspect ratio structures) | *Very good. Covers sample everywhere (but long purge time needed for very high aspect ratio structures) | ||
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*expect no | * We expect no step coverage unless using tilt holder, in which case the step coverage can be very good and can be tuned. | ||
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