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→E-Beam Evaporator (Temescal): added link to new e-beam evap with 10 pockets
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*[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Chromium|Chromium (Cr)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Chromium|Chromium (Cr)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Copper|Copper (Cu)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Copper|Copper (Cu)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Germanium|Germanium (Ge)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Germanium|Germanium (Ge)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Gold|Gold (Au)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Gold|Gold (Au)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum|Molybdenum (Mo)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum|Molybdenum (Mo)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Nickel|Nickel (Ni)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Nickel|Nickel (Ni)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Niobium|Niobium (Nb)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Niobium|Niobium (Nb)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Palladium|Palladium (Pd)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Palladium|Palladium (Pd)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Platinum|Platinum (Pt)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Platinum|Platinum (Pt)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silver|Silver (Ag)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Silver|Silver (Ag)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Tantalum|Tantalum (Ta)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Tantalum|Tantalum (Ta)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Tin|Tin (Sn)]]
,[[Specific Process Knowledge/Thin film deposition/Deposition of Tin|Tin (Sn)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Titanium|Titanium (Ti)]]   
,[[Specific Process Knowledge/Thin film deposition/Deposition of Titanium|Titanium (Ti)]]   
*[[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]] - thinner layers
,[[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]] - thinner layers


Note that to date (May 2022) we have processes available for deposition of Al, Cr, Cu, Ge, Au, Ni, Nb, Pd, Pt, Ag, Ti, W and Ta as well as Ru. If your favorite metal is not available we may be able to buy a target and develop a recipe, just ask.
Note that to date (May 2022) we have processes available for deposition of Al, Cr, Cu, Ge, Au, Ni, Nb, Pd, Pt, Ag, Ti, W and Ta as well as Ru. If your favorite metal is not available we may be able to buy a target and develop a recipe, just ask.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Temescal"