Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
| Line 63: | Line 63: | ||
*Ar | *Ar | ||
*NH<sub>3</sub> | *NH<sub>3</sub> | ||
* | *O<sub>2</sub> | ||
*H<sub>2</sub> | *5% H<sub>2</sub>/Ar | ||
*High vacuum is possible (10<sup>-6</sup> mbar) | |||
|- | |- | ||
| Line 63: | Line 63: | ||
*Ar | *Ar | ||
*NH<sub>3</sub> | *NH<sub>3</sub> | ||
* | *O<sub>2</sub> | ||
*H<sub>2</sub> | *5% H<sub>2</sub>/Ar | ||
*High vacuum is possible (10<sup>-6</sup> mbar) | |||
|- | |- | ||