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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Bureaucrats, danchip, Administrators
1,918 edits
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! colspan="9" align="center"| Etch rates in zep resist (nm/min)
! colspan="9" align="center"| zep mask parameters
! Thickness
| 110
| 178
| 180
| 180
| 180
| 110
| 110
| 180
| 348
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! One point on wafer
! zep etch rate (nm/min)
|18
|18
|27
|27
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