Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
| Line 110: | Line 110: | ||
*Wafers with Al | *Wafers with Al | ||
| | | | ||
* | *Silicon | ||
*Silicon | *Silicon oxides and nitrides | ||
* | *Quartz | ||
*Metals - ask for permisson | |||
*III-V materials - '''these cannot be heated above 450 °C,''' otherwise it can lead to outgassing of toxic gases. For that reason, '''III-V samples are limited to a maximum process temperature of 440 °C.''' | |||
| | | | ||
*Depends on the furnace quartz ware: | *Depends on the furnace quartz ware: | ||