Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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*Single-wafer process | *Single-wafer process | ||
*Chips on carrier | *Chips on carrier | ||
*50 mm, 100 mm | *50 mm, 100 mm or 150 mm wafers | ||
| | | | ||
*1-30 50 mm, 100 mm or 150 mm wafers | *1-30 50 mm, 100 mm or 150 mm wafers | ||