Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
| Line 47: | Line 47: | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
| | | | ||
*Ar | |||
*N<sub>2</sub> | *N<sub>2</sub> | ||
* | *Low vacuum is possible (min. 2/3 mbar) | ||
| | | | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
| Line 47: | Line 47: | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
| | | | ||
*Ar | |||
*N<sub>2</sub> | *N<sub>2</sub> | ||
* | *Low vacuum is possible (min. 2/3 mbar) | ||
| | | | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||