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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Line 115: Line 115:
|style="background:LightGrey; color:black"|Gas flows
|style="background:LightGrey; color:black"|Gas flows
|style="background:lightgrey; color:black"|
|style="background:lightgrey; color:black"|
* SF<sub>6</sub>: 0 to 1200 sccm
* SF<sub>6</sub>-1: 0 to 1200 sccm
* O<sub>2</sub>: 0 to 200 sccm
* SF<sub>6</sub>-2: 0 to 100 sccm
* C<sub>4</sub>F<sub>8</sub>: 0 to 400 sccm
* O<sub>2</sub>: 0 to 50 sccm
* N<sub>2</sub>: 0 to 500 sccm
* Ar: 0 to 283 sccm
* Ar: 0 to 283 sccm
* He: 0 to 11 sccm
|style="background:lightgrey; color:black"|
|style="background:lightgrey; color:black"|
* SF<sub>6</sub>: 0 to 1200 sccm
* SF<sub>6</sub>-1: 0 to 1200 sccm
* SF<sub>6</sub>-2: 0 to 100 sccm
* O<sub>2</sub>: 0 to 200 sccm
* O<sub>2</sub>: 0 to 200 sccm
* C<sub>4</sub>F<sub>8</sub>: 0 to 400 sccm
* C<sub>4</sub>F<sub>8</sub>: 0 to 400 sccm
* Ar: 0 to 283 sccm
* Ar: 0 to 283 sccm
|style="background:lightgrey; color:black"|
* SF<sub>6</sub>
* O<sub>2</sub>
* C<sub>4</sub>F<sub>8</sub>
* Ar
|style="background:lightgrey; color:black"|
|style="background:lightgrey; color:black"|
{|
{|
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