Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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*Theoretical values: | *Theoretical values: | ||
*1.2 nm/min (60 °C) | *1.2 nm/min (60 °C) | ||
* | *7.5 nm/min (80 °C) | ||
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*Theoretical values: | *Theoretical values: | ||
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*Theoretical values: | *Theoretical values: | ||
*1.2 nm/min (60 °C) | *1.2 nm/min (60 °C) | ||
* | *7.5 nm/min (80 °C) | ||
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|style="background:LightGrey; color:black"|Etch rates in other oxides | |style="background:LightGrey; color:black"|Etch rates in other oxides | ||