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Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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=Request for user exposure slot=
=Request for user exposure slot=
As of October 16th 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff in order to optimize the use of the system. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign the user a slot of an appropriate length for the exposure. In this way we ensure that booking slots have the correct length and that no tool time is wasted on file preparation.
All exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff in order to optimize the use of the system. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign the user a slot of an appropriate length for the exposure. In this way we ensure that booking slots have the correct length and that no tool time is wasted on file preparation.


It is thus necessary to have a working set of job files before a booking slot is assigned. It is advisable to compile the job files before submitting a request to make sure the job files compile as intended. One can either compile the job on the JEOL 9500 system while another user is exposing or one can compile remotely on the [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] through the external Beamer PC. If you need help creating your job files, please request a meeting and we will be happy to help.
It is thus necessary to have a working set of job files before a booking slot is assigned. It is advisable to compile the job files before submitting a request to make sure the job files compile as intended. One can either compile the job on the JEOL 9500 system while another user is exposing or one can compile remotely on the [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] through the external Beamer PC. If you need help creating your job files, please request a meeting and we will be happy to help.
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The request form [[:File:JEOL9500 request form.docx |can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].
The request form [[:File:JEOL9500 request form.docx |can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk]. <div class="center" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>




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