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Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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*Training can be requested by sending a mail with relevant process flow to training@nanolab.dtu.dk
*Training can be requested by sending a mail with relevant process flow to training@nanolab.dtu.dk
   
   
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==Original JEOL Manual==
The original JEOL manual for the e-beam writer JEOL JBX-9500FS is located on the O-drive: O:\CleanroomDrive\_Equipment\E-beam
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