Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch ]] | [[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]] |
Revision as of 14:29, 24 March 2011
This page is under construction
The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.