Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|FAQ]]
[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|FAQ (Under construction)]]


[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch ]]
[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]]

Revision as of 14:29, 24 March 2011

This page is under construction

The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.


FAQ (Under construction)

Nanoetch (Under construction)