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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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{| border="2" cellspacing="1" cellpadding="3" align="center"
{| border="2" cellspacing="1" cellpadding="3" align="center"
!Recipe
!Recipe
![[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|nano1]]
!nano1.0
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!Tool
!Tool
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[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Images]]
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