Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
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{| border="2" cellspacing="1" cellpadding="3" align="center" | {| border="2" cellspacing="1" cellpadding="3" align="center" | ||
!Recipe | !Recipe | ||
! | !nano1.0 | ||
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!Tool | !Tool | ||
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[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Images]] | |||
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