Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

Revision as of 15:02, 22 March 2011

The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.

Revision as of 10:22, 22 March 2011 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits →‎This page is under construction ← Older edit		Revision as of 15:02, 22 March 2011 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits →‎This page is under construction Newer edit →
Line 6:		Line 6:
	[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ\|.]]		[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ\|.]]

	[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch\|,]]		[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch\| ]]