Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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Once the P mark conditions are set up, setup the Q mark conditions in the same way. From the '''SETWFR''' window click '''Execute'''. The mark scan will start with the P mark rough scan, if the mark is found it will continue to P mark fine scan, if successful the system will continue with Q mark rough scan and finally Q mark fine scan. Below is a few examples of an mark scan routine. In the left image the system has scanned the mark in the x-direction and found a nice feature, the yellow line indicates the system is currently scanning in y. Observe that in a y-axis scan the beam scans along the y-axis to determine the x-coordinate of the mark and vice versa. The center image shows a completed fine scan in a 10 µm window. The last image shows the data output after successfull mark detection. The important parameter is the P mark observation position offset. In this case the offset is (88,-335), this is entered in the SDF file '''OFFSET''' command to make sure the mark is easily found during job execution. | Once the P mark conditions are set up, setup the Q mark conditions in the same way. From the '''SETWFR''' window click '''Save''' and '''Execute'''. The mark scan will start with the P mark rough scan, if the mark is found it will continue to P mark fine scan, if successful the system will continue with Q mark rough scan and finally Q mark fine scan. Below is a few examples of an mark scan routine. In the left image the system has scanned the mark in the x-direction and found a nice feature, the yellow line indicates the system is currently scanning in y. Observe that in a y-axis scan the beam scans along the y-axis to determine the x-coordinate of the mark and vice versa. The center image shows a completed fine scan in a 10 µm window. The last image shows the data output after successfull mark detection. The important parameter is the P mark observation position offset. In this case the offset is (88,-335), this is entered in the SDF file '''OFFSET''' command to make sure the mark is easily found during job execution. | ||
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Examples of PQ mark detection scans. Left: P mark rough scan. Center: P mak fine scan. Right: Output in the '''Calib''' window. Image: Thomas Pedersen. | Examples of PQ mark detection scans. Left: P mark rough scan. Center: P mak fine scan. Right: Output in the '''Calib''' window. Image: Thomas Pedersen. | ||
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=Chip alignment - CHIPAL= | |||
If the exposure uses chip alignment it should be setup and tested with the CHIPAL subprogram. | |||