Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions

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 Also edit the fine scan conditions of the P mark. The windows are essentially identical, the only difference is the dimensions as we now want to scan a much smaller area in order to pinpoint the mark center with as high accuracy as possible.
+{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
+|-
+| [[image:9500AlignmentMarks_small.png|400px]]
+|-
+| colspan="2" style="text-align:center;|
+Alignment marks used in this example. Image: Thomas Pedersen.
+|}