Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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In the '''Scan''' pane one can set the '''Scan position''' and '''Scan width''' to suitable values for the mark in question. In general one should scan a cross at a position half way from the center and at least a width of 300 µm to be sure to hit it. In the '''Offset''' pane make sure the offsets are all set to zero. Click '''Ok''' and execute the scan. | In the '''Scan''' pane one can set the '''Scan position''' and '''Scan width''' to suitable values for the mark in question. In general one should scan a cross at a position half way from the center and at least a width of 300 µm to be sure to hit it. In the '''Offset''' pane make sure the offsets are all set to zero. Click '''Ok''' and execute the scan. | ||
The system will now scan the mark position and attempt to optimise the detected backscatter signal in an iterative loop. After a successful scan the last scan result is displayed. It should show a distinct feature where the mark is detected. The aptly named '''Updating inquiry of a preamp constant''' window will also open. This shows the preamp constants along with a subprogram list that uses | The system will now scan the mark position and attempt to optimise the detected backscatter signal in an iterative loop. After a successful scan the last scan result is displayed. It should show a distinct feature where the mark is detected. The aptly named '''Updating inquiry of a preamp constant''' window will also open. This shows the preamp constants along with a subprogram list that uses the backscatter detector and hence these constants. Copy the constants to all subprograms by clicking '''Select''' and '''OK'''. Now all necessary subprograms have the correct gain/preamp settings. | ||
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