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Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,217 edits
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=Global alignment - SETWFR=
=Global alignment - SETWFR=
The next step is to verify that it is possible to detect the P and Q marks, this is done with the '''SETWFR''' subprogram. Select it and edit the parameters.
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