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Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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==Optical pre-alignment==
==Optical pre-alignment==
The optical pre-aligner is used to measure the location of the P and Q marks of the substrate after loading it to a cassette. The optical pre-alignment procedure will output a stage coordinate for both P and Q marks, a P mark shift relative to the slot center coordinate and a substrate rotation.
The optical pre-aligner is used to measure the location of the P and Q marks of the substrate after loading it to a cassette. The optical pre-alignment procedure will output several useful numbers:
*P mark stage coordinate  
*Q mark stage coordinate
*P mark shift relative to the slot center  
*Substrate rotation


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